期刊名称：JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS ISSN： 1932-5150 出版频率： Quarterly 出版社： SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1000 20TH ST, PO BOX 10, BELLINGHAM, USA, WA, 98225   出版社网址： http://spie.org/ 期刊网址： http://spie.org/x588.xml 影响因子： 1.559 主题范畴： ENGINEERING, ELECTRICAL & ELECTRONIC;    NANOSCIENCE & NANOTECHNOLOGY;    MATERIALS SCIENCE, MULTIDISCIPLINARY;    OPTICS 期刊简介(About the journal)    投稿须知(Instructions to Authors)    编辑部信息(Editorial Board)    About the journal The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) (formerly the Journal of Microlithography, Microfabrication, and Microsystems, 2002-2006) publishes peer-reviewed papers on the development of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, micro-optoelectromechanical systems, and photonics industries. The scope is broad to facilitate synergy and interest between the communities served by the journal.   Topical areas covered include: tools, processes, and materials associated with the lithography of structures that have submicrometer features; technologies to shape three-dimensional structures leading to the fabrication of active and passive electronic, electromechanical, optoelectronic, and opto-electro-mechanical devices, as well as passive optical devices; and core processes and technologies necessary for packaging and integration, with a focus on wafer-scale and other volume integration methods.   Key topics include: Optical lithography Emerging lithographic systems and techniques Resolution enhancement techniques Innovative illumination and aperture filtering schemes Antireflection coatings Optical proximity correction Critical-dimension control Alignment Defect reduction Yield improvement Resist technology and processing Metrology Inspection Binary and phase-shifting mask technology Etching and patterning technologies Plating technologies Replication Surface micromachining Bulk micromachining Focused ion beam technologies Fabrication and lithography for three-dimensional systems MEMS/MOEMS Micro-optics Novel package design Modeling Enabling materials Interconnect technology Integration processes Wafer-scale packaging Three-dimensional packaging Active and passive alignment Alignment structures Microassembly Structural integrity Microcooling systems Microsystem design and applications Instructions to Authors Prepare a manuscript Manuscripts should be submitted in English, and the presentation should be as succinct as comprehension will permit. Manuscripts are reviewed and refereed. Those accepted for publication are edited for conformance to the journal's style. Metric units should be used unless to do so is not feasible or would result in a serious loss of clarity. Please refer to the acronym list to keep the usage of standard terminology consistent across the journal. For peer review, manuscripts should be submitted with the figures/tables and their captions incorporated into the same file as the manuscript text. However, upon acceptance, authors will be required to submit individual figure files and a properly formatted manuscript for use in production. English-Language Editing Services: Authors (particularly non-native English speakers) who would like assistance in improving the quality of English in their manuscripts prior to submission may wish to consider using an English-language editing service. Several commercial vendors provide such services, including American Journal Experts, SPi Professional Editing Services, and Nature Publishing Group. Please note that SPIE has no connection with any of these services and cannot provide an endorsement of their work. These services are mentioned for informational purposes only. For details of manuscript preparation, see the topics below. Types of Manuscripts Acceptable File Formats Components of a Manuscript Color Figures Multimedia   Types of manuscripts:   Letter: A short technical communication of significant interest intended for rapid publication in the JM3 Letters section of the journal. The manuscript length may not exceed three printed journal pages. Further details below. JM3 Letters: The purpose of this section of the Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) is to provide rapid publication of short technical communications of significant interest. Submissions should be prepared in the same manner as a regular paper, except that there are no author biographies. The manuscript length may not exceed three printed journal pages. This corresponds to approximately 3000 words (excluding title, abstract, and author information); figures will further reduce the maximum word content. A brief cover letter setting forth the significance of the paper must accompany the manuscript. If accepted, letters will be scheduled for publication in the next available issue of JM3. Letters will be open access in the online journal and will also be part of the SPIE Letters Virtual Journal. Regular page charges apply to letters. Regular Paper: A full-length manuscript presenting original work intended as a regular contribution to the journal. Special Section Paper: A full-length manuscript presenting original work intended for submission to a special topical section organized by a guest editor. Communication: A short technical communication on original work, a comment on a recent paper, or an erratum.   The following file formats are accepted:   Text: Microsoft Word and LaTeX/REVTeX. Figures: TIFF, PostScript, EPS, or PDF (minimum 300 dpi resolution). See additional requirements below. Multimedia: QuickTime nonstreaming video (.qt or .mov), MPEG, DV, PCM, WAV, AIFF, and MP3 at 128 Kbs or greater. See additional requirements below.   Manuscripts must conform to the following: Title page: List the paper title; the name(s) of the author(s); and the affiliation, complete mailing address, phone number, fax number, and E-mail address (if available) of each author. List sponsorship information in an acknowledgment section at the end of the paper. Abstract: (200 words maximum) It should be a summary of the paper and not an introduction. Because the abstract may be used in abstracting journals, it should be self-contained (i.e., no numerical references) and substantive in nature, presenting concisely the objectives, methodology used, results obtained, and their significance. For further guidelines, please read the brief article titled "How to Write an Abstract (PDF)," by Philip Koopman. (Courtesy of Philip Koopman, Carnegie Mellon University.) Subject terms or keywords: A maximum of eight are required. Text: Type manuscript double-spaced, in a single column, using a readable font size (for example, 12-point type).  Equations: Create equations using MathType or Equation Editor 3.0. If using Word 2007, do NOT use the more easily accessible Microsoft Math Editor. When equations built with Microsoft’s Editor are back-saved to the .doc format, they are converted to low-resolution graphics and will not be usable for composition. To use MathType or the old Equation Editor 3.0, you will need to select Object on the Text section of the Insert tab and then select MathType/Equation Editor in the drop-down menu. References: References to published literature must be typed double-spaced and numbered consecutively in the order of their citation in the text. Private communications or unpublished reports should be treated as references. Click here for sample book and journal references. Books: Author(s) (list first and middle initials, then last name), book title in italic, publisher, city, and year published. (When citing a paper chapter in a book, list the chapter title in quotes, and the book title in italic, plus the page numbers.) Example: J. A. Hall, "Imaging tubes," Chap. 13 in The Infrared Handbook, W. W. Wolfe, G. J. Zissis, Eds., pp. 132-176, ERIM, Ann Arbor, MI (1978). Journals: Author(s) (list first and middle initials, then last name), paper title in quotes, journal name in italic (abbreviate only well-known journals), volume and issue numbers, inclusive page numbers, and year published. Example: N. Bluzer and A. S. Jensen, "Current readout of infrared detectors," Opt. Eng.26(3), 241-248 (1987). Footnotes: Use textual footnotes only when necessary to present important documentary or explanatory material whose inclusion in the text would be distracting. Figures: must be submitted electronically in PS, EPS, TIFF, or PDF format. We cannot accept application files, i.e., Corel Draw, Microsoft Word, etc. Number all figures in the order that they appear in the text. All figure parts must be labeled (a), (b), etc.  It is important that these instructions be followed precisely for the graphics files to be utilized in the journal production process. Size your illustrations according to the journal's specifications for column widths. Illustrations are generally reduced to either one-column width (3 & 5/16th inches) or two-column width (7 inches) or smaller.  Submit each illustration at the final size in which you would like it to appear in the journal. Each illustration should be prepared for 100% reproduction. Avoid submitting illustrations containing small axes with oversized labels. Ensure that line weights will be 0.5 points or greater in the final published size. Line weights below 0.5 points will reproduce poorly. The graphic should be sent with the correct orientation. When using Photoshop, remove the "alpha channel" and flatten the image to one layer. Set the graphic for 600 dpi resolution for line art, 264 dpi for halftones, and 600 dpi for combinations (line art + halftone). Save line art as black/white bitmap; not grayscale. Save halftones and combinations as grayscale, not black/white bitmap. Submit color files at 300dpi TIFF, PS, or EPS format. If selecting a file mode, use CMYK (Cyan, Magenta, Yellow, Black) or RGB (Red, Green, Blue). Set the bounding box to image to avoid excess white space around the image. Submit ALL illustrations for each article, including line art. Make sure there is only ONE figure per file. Each figure file should contain all parts of the figure. For example, if Figure 1 contains three parts (a, b, c), then all of the labeled parts should be combined in a single file for Figure 1. 8 pt. labels are preferable. Check files for extraneous information. Edit out any figure captions or e-mail headers. The only data in the file should be the figure itself. Figure and table captions: Type double-spaced after the references to be typeset with the manuscript. Biographies and photographs: Bios and photos of authors are printed with each accepted paper. Send a brief professional biography not to exceed 150 words and a head-and-shoulders photograph in TIFF, EPS, PostScript, or PDF format. Both black-and-white and color photos are acceptable. The size of the photo in the journal will be 1 and 1/16ths inches wide by 1 and 5/16ths inches high; we will resize the photo if necessary, but please try to prepare a photo as close to this size as possible. Make sure that the resolution is at least 300 dpi. Multimedia: Video and audio files are accepted. Please refer to the multimedia guidelines below for specific submission guidelines and requirements. Color Figures   Color printing: Authors or their sponsors must bear the cost of printing in color. The cost is $600 for the first color figure and $300 for each additional color figure. Authors who would like figures printed in color must complete and return a Color Authorization Form (PDF) upon acceptance of their manuscript. Color online only: All figures submitted electronically in color will be published in color online without charge, provided the figures are submitted in the proper format. Authors who wish to have color figures published in the print journal will continue to incur color printing charges. Figures must be submitted electronically in TIFF, PostScript, or EPS. (We cannot accept JPEG, GIF, or any other file formats for production of figures.) Authors should submit a single color version of the figure. The black-and-white figure for print will be derived from the color file submitted by the author. Authors who choose to submit color figures are responsible for ensuring that the captions and descriptions in the text are suitable for both the color online and black-and-white print versions of the journal, and that the figure itself will be readable in both versions. Figures must be prepared according to the journal guidelines. The journal reserves the right to publish figures in black and white online if the electronic figures are unusable or are received too late in the production process. If the electronic files are utilized, authors will see the color figures in the PDF proof of their article. Multimedia Guidelines   Authors may submit multimedia files as an integral part of the paper. Supplemental multimedia material is not accepted.   Video Submissions: Acceptable file formats include: QuickTime nonstreaming video (.qt or .mov) MPEG (.mpg) The acceptable file formats outlined above are playable using standard media players such as QuickTime and Windows Media Player. Media players should be used to check file properties and image/sound quality prior to submission. The recommended maximum size for each video file is 10-12 MB. Video files should be labeled as videos and numbered in the order in which they are referred to in the text, e.g., Video 1, Video 2, etc. The media file type (QuickTime or MPEG) and file size should be included in parentheses at the end of the caption; e.g., (MPEG, 2.5 MB). Videos should either be associated with a figure or submitted as a stand-alone still image, allowing for some static representation of the multimedia file. If videos are included as part of an existing figure, they should be described and identified within the figure caption. For example:   Fig. 1 Confocal microscopic images of red blood cells in (a) an isotonic buffer (Video 1) and (b) a hypertonic buffer (Video 2) in three different viewing projections (Video 1, MPEG, 3.1 MB; Video 2, MPEG, 4.2 MB).   Stand-alone videos should be accompanied by a representative still image. A caption describing the content of the video file is required, similar to a typical figure caption. For example: Video 1 Photodynamic therapy response of the targeted region (QuickTime, 5 MB). Editorial Board Editor-in-Chief   Burn J. Lin TSMC, Ltd. Taiwan   Senior Editors   William H. Arnold ASML USA   Yu-Cheng Lin National Cheng Kung Univ. Taiwan   M. Edward Motamedi Revoltech Microsystems USA   Thomas J. Suleski Univ. of North Carolina at Charlotte USA   Associate Editors   Jos Benschop ASML Netherlands   Will Conley Freescale Semiconductor Inc. USA   Kevin Cummings ASML USA   Ralph Dammel AZ Electronic Materials USA   David L. Dickensheets Montana State Univ. USA   Weileun Fang National Tsing Hua Univ. Taiwan   Gary K. Fedder Carnegie Mellon University USA   Donis Flagello Nikon Research Corp. of America USA   John Hartley State Univ. of New York, Albany USA   Tatsuhiko Higashiki Toshiba Corp. Japan   Greg Hughes SEMATECH, Inc. USA   Winfried Kaiser Carl Zeiss Germany   Randall L. Kubena HRL USA   Stephen M. Kuebler Univ. of Central Florida USA   Timothy P. Kurzweg Drexel Univ. USA   Robin Liu CombiMatrix Corp. USA   Roya Maboudian Univ. of California, Berkley USA   Chris Mack USA   Katsuhiko Murakami Nikon Corporation Japan        Shinji Okazaki EUVA Japan   Soichi Owa Nikon Japan   Ian Papautsky Univ. of Cincinnati USA   Moshe Preil ASML USA   Chris Progler Photronics, Inc. USA   Rajeshuni Ramesham Jet Propulsion Lab. USA   Douglas J. Resnick Imprints, Inc. USA   John Rogers Univ. of Illinois at Urbana-Champaign USA   Kurt Ronse IMEC Belgium   Frank Schellenberg Mentor Graphics USA   Harald Schenk Fraunhofer Inst. für Photonische Mikrosysteme Germany   Stefan Sinzinger Technische Univ. Ilmenau Germany   Jeffry Sniegowski MEMX, Inc. USA   Srinivas Tadigadapa Pennsylvania State Univ. USA   Vijay K. Varadan Univ. of Arkansas USA   Wanjun Wang Louisiana State Univ. USA   Alfred Wong Magma Design Automation USA   Anthony Yen Taiwan Semiconductor Manufacturing Co., Ltd. Taiwan   Hans Zappe Univ. of Freiburg Germany