期刊名称：JOURNAL OF MICROMECHANICS AND MICROENGINEERING ISSN： 0960-1317 版本： SCI-CDE 出版频率： Monthly 出版社： IOP PUBLISHING LTD, TEMPLE CIRCUS, TEMPLE WAY, BRISTOL, ENGLAND, BS1 6BE   出版社网址： http://iopscience.iop.org/ 期刊网址： http://iopscience.iop.org/0960-1317 影响因子： 1.881 主题范畴： ENGINEERING, ELECTRICAL & ELECTRONIC;    NANOSCIENCE & NANOTECHNOLOGY;    INSTRUMENTS & INSTRUMENTATION;    PHYSICS, APPLIED 期刊简介(About the journal)    投稿须知(Instructions to Authors)    编辑部信息(Editorial Board)    About the journal   ISSN 0960-1317 (Print) ISSN 1361-6439 (Online) Journal of Micromechanics and Microengineering covers all aspects of microelectromechanical structures, devices and systems, as well as micromechanics and micromechatronics. The journal aims to highlight the link between fabrication technologies and their capacity to create novel devices. The journal focuses on fundamental work in fabrication and process technologies, including bulk and surface micromachining, LIGA, EDM, bonding, lithography, and focussed ion beam techniques. New aspects of production techniques to create micromechanical systems and reliability aspects are reported. Applications of these techniques in sensor and actuator areas are covered. Typical devices include accelerometers, displays, resonators, micromotors, microvalves and pumps, micropositioners, microrobots, micro-optical systems and MEMS for RF applications. Methods to improve the achievable results are reported, such as CAD and modelling tools to predict the performance of micromechanical systems, and metrology to evaluate their performance. The journal also covers interface electronics and integration and vacuum microelectronics.   Instructions to Authors What we look for in your article We consider for publication in Institute of Physics (IOP) journals articles which: are original, novel and add significantly to research already published are of interest to the community have sound motivation and purpose have not been published previously are not under consideration for publication in any other journal or book available through a library or by purchase Articles should not: present new but trivial and obvious results make unsubstantiated conclusions bury new results beneath too much scene-setting and recapping of findings already published present incremental research Articles based on theses for higher degrees may be submitted, although authors should take care that such articles are prepared in the format of a research paper, which is more concise than is appropriate for a thesis. Articles presented at conferences may also be submitted, provided these articles do not appear in substantially the same form in a published conference proceedings. Reports that are not available to the general public are not regarded by IOP as prior publications. Authors of articles are not restricted to being members of any particular institute, society or association. All articles offered for publication are given unbiased consideration, each being judged on its merits without regard to the race, gender, religious belief, ethnic origin, citizenship or political philosophy of the author(s). We treat all articles as confidential until they are published. How to prepare your article Please read these guidelines carefully and familiarize yourself with the style and editorial policies of your chosen journal by examining the online version and taking a look at the Featured Articles. It is important to check that your research fits well into the scope of your chosen journal before you submit it. You are also advised to read the IOP ethical policy. If you have any queries, please contact us. Your article should normally consist of the following: a title page with title of article, name(s) of author(s) and address(es) of establishment(s) where the work was carried out an abstract the text figures a list of references The following sections give a brief overview of the main elements or structure of an article. Read them first. You can find more detail in our LaTeX and Word guidelines which are presented in the style of a typical article. Title page Title of article This should be concise but informative. Authors and addresses For multiple-authored articles list the names of all the authors first, followed by the full postal addresses, using superscript numeric identifiers to link an author with an address, where necessary (see LaTeX and Word guidelines). If an author's present address is different from the address at which the work was carried out, this should be given as a footnote to the page. You can also include e-mail addresses, telephone numbers and fax numbers on the title page. Short title This is used at the top of odd-numbered pages in the printed journal and should not exceed 80 characters. You do not need to provide short titles for Fast Track Communications, Rapid Communications or Topical Reviews. Classification numbers Many of our journals use the Physics and Astronomy Classification Scheme (PACS), published by the American Institute of Physics to help with the refereeing process. We therefore ask you to supply a list of appropriate classification numbers. You do not need to supply classification numbers when submitting to Physics Education. When submitting to Inverse Problems and Nonlinearity you should include suitable classification numbers from either the Physics and Astronomy scheme or the Mathematics Subject Classification (MSC), but MSC is preferred. You should include a list of keywords when submitting to Measurement Science and Technology, Physics in Medicine and Biology and Physiological Measurement. Abstract Your abstract should give readers concise information about the content of your article. It should be informative and not only indicate the general scope of the article but also state the main results obtained and conclusions drawn. As the abstract is not part of the text it should be complete in itself; no table numbers, figure numbers, references or displayed mathematical expressions should be included. It should be suitable for direct inclusion in abstracting services and should not normally exceed 200 words. If the article is not in English, an English version of the abstract must also be supplied. When readers are searching for information online, an abstract of an article is likely to be the first thing they see. Consequently your abstract needs to be concise but convey as much information as possible about the content of your article. Text Research papers and review articles can be divided into numbered sections and subsections. You should use tables only to improve conciseness or where the information cannot be given satisfactorily in other ways such as by histograms or graphs. Tables should be numbered serially and referred to in the text by number (table 1, etc). Each table should have an explanatory caption which should be as concise as possible. If your article consists of a very large amount of tabular material such as long lists of crystallographic results, computer programs and spectrographic results we would not normally publish these in full. Instead these may be published online as supplementary data files. In terms of general style, conciseness in writing helps the reader, but clarity is most important. Short sentences and paragraphs make reading easier. You should aim for consistency within your article in matters such as hyphenation and spelling. All acronyms and abbreviations should be clearly explained when they first appear in the text, and all units used should be consistent throughout the article. If English is not your first language, you should ask an English speaking colleague to read through your article or at least apply a UK English spellchecker to your article. Mathematics Detailed information on the presentation of mathematics, formulae and equations is provided in our LaTeX and Word guidelines. References It is vitally important to fully acknowledge all relevant work and we advise that you also consult our ethical policy for general guidance on compiling your reference list. A complete reference should provide your reader with enough information to locate the article concerned and should consist of: name(s) and initials, date published, title of journal or book, volume number, editors (if any) and, for books, town of publication and publisher (in parentheses), and finally the page numbers. Where there are up to ten authors, all authors' names should be given in the reference list. Where there are more than ten authors, only the first name should appear followed by et al. You should take particular care to ensure that the information is correct so that IOP's HyperCiteTM facility can hyperlink to the article successfully. Material which is really a footnote to the text should not be included in the reference list, which should contain only references to bibliographic data. Copies of cited publications not yet available publicly should be submitted for the benefit of the referees. Unpublished results and lectures should be cited for exceptional reasons only. Before submitting your article, please ensure you have done a literature search to check for any relevant references you may have missed. Journal specific notes: It can be helpful to include first and last page numbers, particularly for review articles and for journals such as Reports on Progress in Physics; final page numbers are a requirement for submissions to Physics in Medicine and Biology and Physiological Measurement. Inverse Problems, Journal of Neural Engineering, Measurement Science and Technology, Physical Biology, Physics in Medicine and Biology and Physiological Measurement require titles of articles in journals in their reference lists. You can use either of the referencing systems, alphabetical (Harvard) or numerical (Vancouver), described below, except for Physics in Medicine and Biology and Physiological Measurement, which insist on the Harvard system. For articles prepared in LaTeX, please use the tools provided in your LaTeX class file (for example IOP's recommended class file). For articles prepared using Microsoft Word, please refer to the detailed Word guidelines, which contain much more detail with examples. Alphabetical system (Harvard) In the Harvard alphabetical system the name of the author appears in the text together with the year of publication, e.g. (Smith 2001) or Smith (2001) (as appropriate). Where there are only two authors both names should be given in the text (Smith and Jones 2001) or Smith and Jones (2001); however, if there are more than two authors only the first name should appear followed by et al, (Smith et al 2001) or Smith et al (2001). If you refer to different works by one author or group of authors in the same year they should be differentiated by including a, b, etc after the date (e.g. 2001a). If you refer to different pages of the same article, the page number may be given in the text, e.g. Smith (2001, p 39). The reference list at the end of your article using this system should be in alphabetical order. Numerical system (Vancouver) In the numerical system you should number your references sequentially through the text. The numbers should be given in square brackets and one number can be used to refer to several instances of the same reference. The reference list at the end of the article lists the references in numerical order, not alphabetically. Figures Carefully chosen and well-prepared figures, such as diagrams and photos, can greatly enhance your article. We encourage you to prepare figures that are clear, easy to read and of the best possible quality. Characters should appear as they would be set in the main body of the article. We will normally use figures as submitted; it is therefore your responsibility to ensure that they are legible and technically correct. Note: If you are intending to use previously published figures, you must obtain written permission from the copyright holder before using them in your article. To get the best possible results in print and online, please consider the following points when preparing your figure files: Shading and fill patterns should be avoided wherever possible because diagrams containing them have to be printed as half-tones and undesirable interference patterns may be produced on printing. Readers of your online article will probably download and print it on a black and white printer which may make coloured lines difficult to distinguish. To avoid this problem, please consider identifying curves by methods other than colour, for example: by letters (upper case Roman), by the symbols used for the data points (e.g.*, ) or by the type of line (e.g. --, full curve; - - - , broken curve; - ?- ?-, chain curve). When producing figures using colours, light colours such as yellow, light green, light blue, light grey, etc should be avoided because they generally reproduce poorly during the black and white printing process. Wherever possible electronic figures should be tightly cropped to minimize superfluous white space surrounding them. This reduces file sizes and helps the alignment of figures on the printed page. Detailed information on common graphic formats and their preparation with examples are provided in our graphics guidelines. Colour figures The use of colour in figures can enhance the effective presentation of results, and there are no restrictions on the use of colour in the online version of your article. However, because conventional full-colour printing remains an expensive process, we must ask you (or your institution) to pay the additional costs incurred (i.e. the costs over and above the cost of normal black-on-white reproduction) if you also require colour in the printed version of your article. An estimate of the charges for your article can be obtained from the Publishing Administrator of the journal. Exceptions: There are no charges for colour reproduction of figures in the printed versions of Nanotechnology and Modelling and Simulation in Materials Science and Engineering when the use of colour is clearly required to further understanding and communication. Physics Education is published in full colour throughout and authors are encouraged to submit photographs and illustrations in colour wherever possible. There is no additional charge for offprints of articles containing colour figures, but authors are reminded that these must be ordered by the time proofs are returned; reprints produced after publication are very expensive. If you need further information or guidance, please contact the journal. Figure captions Your figures should be numbered in the order in which they are referred to in the text. If there is more than one part to a figure (e.g. figure 1(a), figure 1(b) etc), the parts should be identified by a lower-case letter in parentheses close to or within the area of the figure. Captions should be included in the text and not in the graphics files. Micrographs should include a scale bar of appropriate size, e.g. 1 m. Multimedia All of our journals encourage authors to submit multimedia attachments to enhance the online versions of published research articles. Multimedia enhancements typically consist of video clips, animations or supplementary data such as data files, tables of extra information or extra figures. They can add to the reader's understanding and present results in attractive ways that go beyond what can be presented in the print version of the journal. The printed journal remains the archival version, and multimedia items are supplements which enhance a reader's understanding of the article but are not essential to that understanding. For electronic-only journals, multimedia attachments may be used to convey essential information. Length of submissions Most journals have guidelines for the maximum recommended length of each different type of article, as detailed in the scope available from the journal's homepage. It is important that you follow these guidelines when preparing your submission. The length of an article can be calculated by allowing 600 words per page in a B5-sized journal or 900 words per page in an A4-sized journal. Diagrams and tables usually occupy the equivalent of 200-300 words each, and you should allow for this in your total. What files to submit We encourage you to send us your article in electronic form so it can be refereed without postal delays and be published more quickly. You are welcome to send PDF and PS files of your article, but all the separate text and figure files for your article must also be supplied because: The PDFs we send to referees are built to our own IOP standards. If your article is accepted for publication, we need the separate files to make the production stage quicker. The guidelines below provide the essential information you need to prepare your article in a form that will enable us to most efficiently process your submission. Naming your files Please name all your files according to the following guidelines: use only characters from the set a to z, A to Z, 0 to 9 and underscore (_); do not use spaces in file names; include an extension to indicate the file type (e.g., .doc, .txt, .eps, etc); do not use any accented characters; for example, ? ? ? ? ? etc because these can cause difficulties when processing your files. In addition to the above points, please give figure files names which indicate the numbers of the figures they contain; for example, figure1.eps, figure2.tif, figure2a.gif etc. If a figure file contains a figure with multiple parts, for example figure 2(a) to 2(e), give it a name such as figure2a_2e.jpg, and so forth. Article text files TeX and LaTeX The text of articles may be submitted in any common variant of TeX including LaTeX 2e, REVTeX, AmSTeX, AmSLaTeX and plain TeX. Full details and a sample article prepared in LaTeX can be found in our LaTeX guidelines. A class file for preparing articles using LaTeX 2e is also available for download. We have copies of the common packages and class files, and these should not normally need to be sent. If, however, you are using uncommon, customized or personal files then these should be included along with your submission. Microsoft Word We are able to receive articles prepared using Microsoft Word for Windows or Macintosh. Full details and a sample article prepared in Word can be found in our Word guidelines. Fonts used should be restricted to the standard font families (Times, Helvetica, Courier or Symbol). For full details, please refer to our Word guidelines. If special symbols are needed (e.g. Greek characters, accented characters or mathematical symbols) these should be typed using the appropriate TrueType font. Do not use the Symbol facility on the 'Insert' menu as this often results in font conversion problems. Equations must be prepared using Microsoft Word Equation Editor or the full commercial MathType package. Adobe Acrobat PDF The Adobe Acrobat PDF format is suitable for the refereeing process but not the production process. Therefore PDF files should only be supplied in addition to the separate text and figure files for your article. Fonts used should be restricted to the standard font families (Times, Helvetica, Courier or Symbol). Figure files For articles prepared using Microsoft Word, please make sure all graphics are fully embedded in the Word document and supplied as separate files where possible. For full details, please refer to our graphics guidelines. For articles prepared using LaTeX2e, please make sure that your figures are all supplied as EPS and linked to your main TeX files using appropriate figure inclusion commands such as \includegraphics. For full details, please refer to our graphics guidelines. Our preferred graphics format is vector Encapsulated PostScript (EPS). These files can be used directly to give high quality results and file sizes are small in comparison with most bitmap forms. Most graphics software has the facility to save as or export as EPS. Vector formats The advantage of vector graphics is that they give the best possible quality at all output resolutions. In order to get the best possible results, please note the following important points: Fonts used should be restricted to the standard font families (Times, Helvetica, Courier or Symbol). If vector EPS files include bitmap information, the bitmap should conform to the specification given in the section on bitmap formats. Certain proprietary vector graphics formats such as Origin, Kaleidagraph, Cricket Graph and Gnu Plot should not be sent in their native format. If you do use these applications to create your figures, please export them as EPS. For full details, please refer to our graphics guidelines. Bitmap formats Unlike vector images, which are readily scaleable, bitmap images frequently present quality problems in the production of printed and electronic versions of our journals. Quality is basically dependent on two attributes of a bitmap graphics file: resolution and size (bitmap dimensions in pixels). Low resolution files do not reproduce well, especially when enlarged. Files with small bitmap dimensions are frequently too small to reproduce well at the resolution required for printing and suffer an unacceptable reduction in quality if enlarged. For these reasons, black and white, greyscale and colour bitmap graphics files should all have a resolution of at least 300 dpi (preferably 600 dpi for black and white bitmap graphics files). In addition, the bitmap dimensions should be sufficient to produce an image of adequate size (normally 3 to 6 inches wide, or 900 to 1800 pixels for a 300 dpi image). Files in most bitmap formats are acceptable, including: TIFF (this is our preferred bitmap format), BMP, GIF and JPEG. But please note that if your GIF and JPEG graphics files have been derived from Web sites they may not suitable for printing purposes as they are generally specified at only screen resolution (72 dpi). Note: If you intend to supply your figures as JPEG files, the following points are important: The JPEG compression method discards image data and is referred to as 'lossy' compression. When saving directly from an application it is better to choose a loss-less format such as TIFF. Although a 'higher quality' compression setting in your software results in less data being discarded, JPEG compression may degrade details in an image-particularly in images that contain type or vector art. Do not repeatedly resave a JPEG file because the loss of image data occurs each time you resave the image. Always save JPEG files from the original (non-JPEG) image, not from a previously saved JPEG. Note on file sizes: For information on how to avoid unnecessarily large bitmap files, please see our graphics guidelines. Multimedia files Video clips and animation Acceptable formats for video or animation clips are MPEG, QuickTime, Windows AVI or Animated GIF. Your video or animation clips are intended for internet use via our Web server, and we need to consider the needs of users with slow internet connections (e.g. modem-based users) so that your work can be made available to the widest possible readership. Please aim to minimize file sizes and data rates, by considering the following points: 480 x 360 pixels is the recommended maximum frame size. A recommended frame rate is 12-15 frames per second (fps). (Many packages output 30 fps as standard, but you can specify a lower frame rate.) Use a 256 colour palette if that is suitable for the presentation of the material. Please consider the use of lower specifications for all these points if the material can still be represented clearly. Our recommended maximum file size is 3MB. Our recommended maximum data rate is 150 KB/s. The various formats have different characteristics that you should consider when choosing the format for your material: MPEG Suitable for photo-realistic material. Requires users to have a third party viewer. We recommend MPEG 1. The MPEG standard is specified in terms of millions of colours and at least 24 fps, so you cannot choose lower specifications for these settings. QuickTime and Windows AVI Suitable for computer-generated material. Requires users to have a third party viewer. We recommend the Cinepak codec for compression. This provides good compression and, importantly, it is widely supported. You can often consider the use of a 256 colour palette for computer-generated material. As a general rule, we recommend using Quality 75%. Animated GIF Suitable for computer-generated material. Animations may be rendered directly in a Web browser without the need for a third party viewer. Please use only standard GIF functions as some browsers don't support the whole GIF 89 standard. Because GIF compression is not good, consider small frame sizes and low frame rates. Since the printed journal is the archival copy, a representative frame from your movie or animation should be included in the manuscript as a figure. Include the file size and type of the multimedia file in the figure caption. Supplementary data Data files or extra figures can be submitted in any of the usual formats (PDF, Word, TeX, EPS, GIF, TIFF, etc). In addition, we are happy to consider output files from specialized data processing software and computer program codes. As we will not always be able to check the contents of data files, we request that authors also submit a 'read-me' file containing brief instructions on how to use the file, and a signed statement confirming that the material is as stated and is pertinent to the article. Supplementary data submitted as figures, TeX or Word will appear in the electronic journal in PDF format; specialized files will be offered in their original form. Editorial Board Editorial board Editor-in-Chief R Puers, Katholieke Universiteit Leuven, Heverlee, Belgium Regional Editor for Asia K Sato, Nagoya University, Japan Regional Editor for North America M G Allen, Georgia Institute of Technology, Atlanta, USA Editorial Board C H Ahn, University of Cincinnati, OH, USA M Bao, Fudan University, Shanghai, People's Republic of China S Bouwstra, MEMS Technical Consultancy, The Netherlands H H Busta, Prairie Prototypes, IL, USA K Chun, Seoul National University, Korea G Delapierre, Centre d'Etudes Nucl閍ires de Grenoble, France N F de Rooij, University of Neuch鈚el, Switzerland M Elwenspoek, University of Twente, Enschede, The Netherlands P Enoksson, Chalmers University of Technology, Gothenburg, Sweden W Fang, National Tsing Hua University, Taiwan G Fedder, Carnegie Mellon University, PA, USA P J French, Delft University of Technology, The Netherlands Y Gianchandani, University of Michigan, Ann Arbor, USA M Gijs, Swiss Federal Institute of Technology, Lausanne, Switzerland M A Gr閠illat, Intersema Sensoric SA, Bevaix, Switzerland K Hane, Tohoku University, Sendai, Japan C Hierold, Swiss Federal Institute of Technology, Zurich, Switzerland K Hjort, Uppsala University, Sweden E S Kim, University of Southern California, Los Angeles, CA, USA K Najafi, University of Michigan, Ann Arbor, USA T Ono, Tohoku University, Sendai, Japan A M Parameswaran, Simon Fraser University, Burnaby, Canada O Paul, University of Freiburg, Germany D Polla, University of Minnesota, Minneapolis, USA M L Reed, University of Virginia, Charlottesville, USA D Reynaerts, Katholieke Universiteit Leuven, Belgium R Sawada, Kyushu University, Fukuoka, Japan W P Taylor, Allegro Microsystems Inc., Manchester, NH, USA Founding Editors W N Carr H Guckel